Anodic bonding process

Details Anodic bonding process Anodic bonding process

1995-04-19

1998-10-13

Griffin, Steven P.

Glass manufacturing

Processes

Fusion bonding of glass to a formed part

65 40, 65 591, 65 594, 1562722, 1562739, C05C 2702

Patent

active

058206485

ABSTRACT:
A process for anodic bonding, in which Si substrate and glass substrate are contacting each other, a voltage is applied therebetween, and then light is irradiated on a contact portion thereof, whereby the Si substrate and the glass substrate are bonded at a lower temperature than transition temperature of the glass substrate.

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