Anodic bonding method for making pressure sensor

Details Anodic bonding method for making pressure sensor Anodic bonding method for making pressure sensor

1995-06-07

1997-12-09

Simmons, David A.

Adhesive bonding and miscellaneous chemical manufacture

Methods

Surface bonding and/or assembly therefor

1562731, B32B 3114

Patent

active

056955901

ABSTRACT:
A pedestal mount capacitive pressure sensor (10) is supported in a housing (11) and used to sense fluid pressures to provide air pressure data relating to the performance of air vehicles. The capacitive sensor uses a thick base plate (40) on which a diaphragm (48) is mounted. A capacitive electrode (52) is mounted to the diaphragm and pressure deflects the diaphragm to provide an output. The pressure sensor (10) is mounted in an outer housing (11) using a stress isolating pedestal (20).

REFERENCES:
patent: 5446616 (1995-08-01), Warren

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