Coherent light generators – Particular active media – Gas
Reexamination Certificate
2007-06-12
2007-06-12
Harvey, Minsun Oh (Department: 2828)
Coherent light generators
Particular active media
Gas
C372S061000, C372S087000
Reexamination Certificate
active
10672722
ABSTRACT:
Electrodes for a fluorine gas discharge laser are disclosed which may comprise a crown straddling the centerline axis between the pair of side walls and the pair of end walls, comprising a first material, forming at least a portion of the discharge region of the electrode; the crown in traverse cross section having the shape of the upper half of a canted ellipse rotated in the preionizer direction, such that a tangent to the short centerline axis of the ellipse forms an angle with the horizontal. Another embodiment may comprise an anode blade having a top portion and a first and second sidewall portion each intersecting the top portion; the anode blade being formed with the shape in cross section of the top portion being curvilinear and intersecting the generally straight potions of each of first and second sidewall portions along a radius of curvature and with the top portion beveled away from an asymmetric discharge side of the anode.
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Dyer Timothy S.
Gillespie Walter D.
Morton Richard G.
Steiger Thomas D.
Cray William
Cymer Inc.
Golub Marcia A.
Harvey Minsun Oh
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