Anode layer particle beam device

Details Anode layer particle beam device Anode layer particle beam device

2008-09-16

2008-09-16

Vanore, David A. (Department: 2881)

Radiant energy

Ion generation

Field ionization type

C313S111000

Reexamination Certificate

active

11144677

ABSTRACT:
An anode layer particle beam device includes a base, at least an anode placed on top of the base, an insulation layer set between the anode and the base, at least one magnetic pole, made of magnetic and conductive material and can be used as a cathode, an electric discharge channel, positioned between the anode and the magnetic pole, and an insulating material, placed in the electric discharge channel to serve as an insulator between the anode and the magnetic pole. The magnetic pole is positioned on top of the base and on an somewhat elevated outer periphery of the aforementioned anode (with the center of the later also as its center). An orifice is also set on the radiation path of the anode. Accordingly, a process gas stream can be directed into the electric discharge channel and, after being applied with a biased electric field, with the aide of the anode and the magnetic pole device, a particle beam can be generated and radiated out of the channel.

REFERENCES:
patent: 6456011 (2002-09-01), Bugrova et al.
patent: 6919690 (2005-07-01), Siegfried et al.
patent: 7183559 (2007-02-01), Luten et al.

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