Anode for magnetic sputtering of gradient films

Details Anode for magnetic sputtering of gradient films Anode for magnetic sputtering of gradient films

1984-10-17

1988-05-17

Niebling, John F.

Chemistry: electrical and wave energy

Apparatus

Coating, forming or etching by sputtering

20419212, C23C 1434

Patent

active

047448806

ABSTRACT:
An improved anode system for producing uniform gradient coatings by magnetic sputtering is disclosed, comprising a pair of anode plates asymmetrically designed and positioned along the length of the cathode.

REFERENCES:
patent: 4407709 (1983-10-01), Enjouji et al.
patent: 4414087 (1983-11-01), Meckel
patent: 4428809 (1984-01-01), Heimbach et al.
patent: 4431505 (1984-02-01), Morrison, Jr.
patent: 4478702 (1984-10-01), Gillery et al.
Maissel et al., "Handbook of Thin Film Technology", McGraw-Hill Book Co., N.Y., 1970, pp. 4-13 to 4-20.

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