Anode design for semiconductor deposition having novel electrica

Details Anode design for semiconductor deposition having novel electrica Anode design for semiconductor deposition having novel electrica

1998-12-18

2000-09-05

Bell, Bruce F.

Chemistry: electrical and wave energy

Apparatus

Electrolytic

204283, 204287, 204280, 204297R, 204224R, 204252, 204263, 204259, 204266, 204278, 118627, 205292, 205295, C25B 1103

Patent

active

061137596

ABSTRACT:
An anode assembly includes a perforated anode and an electrical contact assembly attached to the anode. A perforated anode holder holds the anode. The anode holder includes perforations at least in a bottom wall such that plating solution may flow through perforations in the anode holder and perforations in the anode. An anode isolator separates the anode and a cathode. The anode isolator includes at least one curvilinear surface. The contact assembly includes a closed or substantially closed cylinder member of titanium or titanium alloy, a copper lining or disk disposed within the cylinder, and a titanium or titanium alloy post fixed and in electrical engagement with the lining or disk.

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