Annular waveguide vertical cavity surface emitting laser array a

Details Annular waveguide vertical cavity surface emitting laser array a Annular waveguide vertical cavity surface emitting laser array a

1997-12-24

2000-07-04

Davie, James W.

Coherent light generators

Particular active media

Semiconductor

372 23, 372 96, H01S 323, H01S 3085

Patent

active

060849002

ABSTRACT:
An array of annular waveguide VCSELs for achieving a stable single high order mode light source characterized as emitting a plurality of emission beams of varying wavelengths. The device array including a first mirror stack with mirror pairs in a Al.sub.x Ga.sub.1-x As/Al.sub.y Ga.sub.1-y As material system lattice matched to an active region. The active region includes an active structure sandwiched between a first cladding region adjacent the first mirror stack and a second cladding region, the active structure having at least one quantum well. The VCSEL further includes a second mirror stack lattice matched to the second cladding region and having mirror pairs in a Al.sub.x Ga.sub.1-x As/Al.sub.y Ga.sub.1-y As material system. The second mirror stack is etched to define a first VCSEL and at least one additional VCSEL, each VCSEL including an etched region, thereby defining an annular emission region through which light generated by the annular waveguide VCSEL is emitted.

REFERENCES:
patent: 5831960 (1998-11-01), Jiang et al.
patent: 5898722 (1999-04-01), Ramdani et al.
patent: 5963568 (1999-10-01), Paoli
patent: 5986998 (1999-11-01), Park

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