Annealing process to improve optical properties of thin film lig

Fishing – trapping – and vermin destroying

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437126, 437132, 437174, 437107, H01L 21203

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054948509

ABSTRACT:
This invention discloses a method to improve significantly the optical properties of rare-earth doped MBE-grown CaF.sub.2 films by annealing such films in a reducing atmosphere (e.g. forming gas) at appropriate temperatures (generally greater than 600 C. Films grown at the same temperature as that used later in the novel annealing process do not exhibit the same PL spectrum nor the high photoluminescence intensity emissions as annealed films. The intensity of the strongest peak 12a in FIG. 2 has a magnitude 3.6 times the intensity than the strongest peak 12 in as-grown film in FIG. 1. Similarly these same films annealed in an oxygen environment do not exhibit the have the desired properties.

REFERENCES:
patent: 5229333 (1993-07-01), Choi et al.
C.-C. Cho, W. M. Duncan, and Y.-Y. Liu, "Optical and Structural Properties of CaF.sub.2 .multidot.Nd Films on Si-Based Substrates", Mat. Res. Soc. Symp. Proc., vol. 301, 1993, Materials Research Society, pp. 325-330.
L. E. Bausa, R. Legros, and A. Munoz-Yague, "Effect of Nd.sup.3+ Concentration on the Emission Spectra of CaF.sub.2 .multidot.Nd Layers Grown by Molecular-Beam Epitaxy", J. Appl. Phys., 70 (8), Oct. 15, 1991, pp. 4485-4489.
L. E. Bausa, R. Legros, and A. Munoz-Yague, "Nd.sup.3+ Incorporation of CaF.sub.2 Layers Grown by Molecular Beam Epitaxy", Appl. Phys. Lett., 59 (2), Jul. 8, 1991, pp. 152-154.
L. E. Bausa, C. Fontaine, E. Daran, and A. Munoz-Yague, "Molecular Beam Epitaxy of Nd-Doped CaF.sub.2 and CaSrF.sub.2 Layers on Si and GaAs Substrates", J. Appl. Phys., 72(2), Jul. 15, 1992, pp. 499-503.
C. A. Freeth and G. D. Jones, "Zeeman Infrared Spectra of Calcium and Strontium Fluoride Crystals Containing Cerium and Neodymium", J. Phys. C: Solid State Phys., 15, 1982, pp. 6833-6849.
MRS Symposium series vol. 116, Yaspir et al. pp. 465-470 (1988).

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