Annealed CVD molybdenum thin film surface

Stock material or miscellaneous articles – All metal or with adjacent metals – Composite; i.e. – plural – adjacent – spatially distinct metal...

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427160, 427162, 427163, 427229, 427252, 427255, 427405, 4274197, 428432, 428450, 428627, 428663, 350 17, B32B 1500, C23C 1100

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044317085

ABSTRACT:
Molybdenum thin films deposited by pyrolytic decomposition of Mo(CO).sub.6 attain, after anneal in a reducing atmosphere at temperatures greater than 700.degree. C., infrared reflectance values greater than reflectance of supersmooth bulk molybdenum. Black molybdenum films deposited under oxidizing conditions and annealed, when covered with an anti-reflecting coating, approach the ideal solar collector characteristic of visible light absorber and infrared energy reflector.

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patent: 3856582 (1974-12-01), Smeggil et al.
Carver et al., "Passivating CVD Molybdenum Films Against Infrared Reflection Losses Caused by Oxidation", Journal of Electrochem. Soc. vol. 125, pp. 1138-1140, 1978.
Oikawa, "Electrical Resistivity of Vacuum-Deposited Molybdenum Films", Journal of Vacuum Sci. Tech. 15(3), May/Jun. 1978, pp. 1117-1121.
Ferguson et al., "Decomposition of Molybdenum Hexacarbonyl", Native, vol. 202, pp. 1327-1328, 1964.
DeRosa et al., "Properties of Molybdenum Films Prepared by Decomposition of the Carbonyl", Journal of Vac. Sci. Tech. vol. 11, No. 1, Jan./Feb., 1974, pp. 455-457.

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