Anisotropic deposition of dielectrics

Details Anisotropic deposition of dielectrics Anisotropic deposition of dielectrics

1993-04-06

1994-04-12

Chaudhuri, Olik

Fishing, trapping, and vermin destroying

437238, 437243, 427535, H01L 21316

Patent

active

053025555

ABSTRACT:
A method for anisotropically depositing a dielectric from a precursor gas in a reactor is disclosed. The method includes reduced pressure, reduced oxygen/precursor gas flow ratio, increased spacing between shower head and susceptor; and also a susceptor having a diameter greater than the diameter of the wafer.

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