Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate
2007-12-11
2007-12-11
Marcheschi, Michael (Department: 1755)
Abrasive tool making process, material, or composition
With inorganic material
C051S308000, C051S309000, C106S003000, C438S692000, C438S693000, C216S099000, C216S100000, C216S101000, C216S102000, C216S105000
Reexamination Certificate
active
10855276
ABSTRACT:
The invention provides chemical-mechanical polishing systems, and methods of polishing a substrate using the polishing systems, comprising (a) an abrasive, (b) a liquid carrier, and (c) a positively charged polyelectrolyte with a molecular weight of about 15,000 or more, wherein the abrasive comprises particles that are electrostatically associated with the positively charged polyelectrolyte.
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Boldridge David W.
Carter Phillip
Chamberlain Jeffrey P.
Cherian Isaac K
Moeggenborg Kevin
Cabot Microelectronics Corporation
Koszyk Francis
Marcheschi Michael
Omholt Thomas
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