Angular velocity sensor with built-in limit stops

Details Angular velocity sensor with built-in limit stops Angular velocity sensor with built-in limit stops

1996-07-22

1998-02-24

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 904

Patent

active

057213771

ABSTRACT:
In an angular velocity sensor, an acceleration sensor is arranged on a resonator formed of a multilayer substrate and attached to a resonating bar. The multilayer substrate includes a top silicon layer, an insulating sacrificial layer arranged below the top silicon layer, and a bottom silicon layer arranged below the insulating sacrificial layer. An excitor causes the resonator to vibrate while a limit stop, configured out of the multilayer substrate, limits the movement of the resonator.

REFERENCES:
patent: 5275047 (1994-01-01), Zabler et al.
patent: 5396797 (1995-03-01), Hulsing, II

Affiliated with

Also associated with

Rating

Angular velocity sensor with built-in limit stops does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Angular velocity sensor with built-in limit stops, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Angular velocity sensor with built-in limit stops will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1876261