Angular velocity sensor structure

Measuring and testing – Speed – velocity – or acceleration

Reexamination Certificate

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Details

C073S507000, C073S510000

Reexamination Certificate

active

07607349

ABSTRACT:
An angular velocity sensor structure for improving the off-axis sensitivity is provided in which a structure for detecting an off-axis acceleration component applied to the angular velocity sensor structure is directly adapted to the sensor structure, thereby measuring the off-axis acceleration component actually applied to the sensor structure without distortion.

REFERENCES:
patent: 5933795 (1999-08-01), Schottler et al.
patent: 6386033 (2002-05-01), Negoro
patent: 7284408 (2007-10-01), Kato
patent: 7461552 (2008-12-01), Acar
patent: 2003/0009308 (2003-01-01), Kirtley
patent: 2006/0184301 (2006-08-01), Konno et al.
patent: 2006/0250504 (2006-11-01), Seo
Translation of JP 1994324066.

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