Angular velocity sensor, related method for manufacturing the se

Details Angular velocity sensor, related method for manufacturing the se Angular velocity sensor, related method for manufacturing the se

1998-04-13

1999-11-23

Brock, Michael

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

310316, 310366, 310370, G01P 904, H01L 4108

Patent

active

059879874

ABSTRACT:
Drive electrodes and sensing electrodes are formed on a front face of a piezoelectric body of a vibrator. A first reference electrode is formed on a rear face. Second reference electrodes are formed on side faces of arm bars of the vibrator at a position corresponding to the sensing electrodes. The second reference electrodes are connected to the first reference electrode formed on said rear face.

REFERENCES:
patent: 3636810 (1972-01-01), Reefman
patent: 4099078 (1978-07-01), Shibata et al.
patent: 4173726 (1979-11-01), Hanji
patent: 4356425 (1982-10-01), Kogure et al.
patent: 5388458 (1995-02-01), Weinberg et al.
patent: 5396144 (1995-03-01), Gupta et al.
patent: 5719460 (1998-02-01), Watarai et al.

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