Angular velocity sensor having cantilever beams

Details Angular velocity sensor having cantilever beams Angular velocity sensor having cantilever beams

1995-06-05

1999-03-30

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350412, G01P 904

Patent

active

058892087

ABSTRACT:
An angular velocity sensor comprises a substrate, a vibrating member of an elongate plate formed by processing a part of the substrate, a support beam formed by processing a part of the substrate to support a center of the vibrating member in a longitudinal direction thereof, a driving device for driving both longitudinal ends of the vibrating member to vibrate in a first direction, and a detecting device for detecting vibrations of the vibrating member in a second direction perpendicular to the first direction thereby to detect an angular velocity of rotation of the substrate.

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patent: 5226324 (1993-07-01), Oikawa

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