Angular velocity sensor element

Details Angular velocity sensor element Angular velocity sensor element

2009-02-17

2011-11-22

Chapman, Jr., John (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504150

Reexamination Certificate

active

08061202

ABSTRACT:
There is provided an angular velocity sensor element which, even when a sudden vibration is given from the outside, can absorb the vibration to prevent the vibration from being transmitted to an element section thereof. An angular velocity sensor element1according to the present embodiment includes: sensor units10ato10cwith driven-related and detection-related vibrating arms; a base section4which couples the sensor units10ato10c; a first fixed section6which is frame-shaped and which surrounds the base section4and the sensor units10ato10c; first coupling arms5ato5cwhich couple the base section4to the first fixed section6; a second fixed section8which is disposed in at least a part of the area around the first fixed section6; and second coupling arms7ato7cwhich couple the first fixed section6to the second fixed section8.

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