Angular velocity sensor device

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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Details

7350416, G01P 900

Patent

active

060239743

ABSTRACT:
An angular velocity sensor device that is produced in a simplified manufacturing process and at a reduced manufacturing cost. The angular velocity sensor device includes a first beam which extends along the surface of the substrate and to which a vibration driving source imparts a vibration in an X-axis direction along the surface of the substrate, and a second beam which follows an elliptical trajectory along the surface of the substrate in response to the resultant force of the force in the X-axis direction and a Coriolis force acting in an Y-axis direction perpendicular to the X-axis direction along the surface of the substrate.

REFERENCES:
patent: 5198663 (1993-03-01), Ichikawa et al.

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