Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1997-09-26
2000-02-15
Williams, Hezron
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
7350416, G01P 900
Patent
active
060239743
ABSTRACT:
An angular velocity sensor device that is produced in a simplified manufacturing process and at a reduced manufacturing cost. The angular velocity sensor device includes a first beam which extends along the surface of the substrate and to which a vibration driving source imparts a vibration in an X-axis direction along the surface of the substrate, and a second beam which follows an elliptical trajectory along the surface of the substrate in response to the resultant force of the force in the X-axis direction and a Coriolis force acting in an Y-axis direction perpendicular to the X-axis direction along the surface of the substrate.
REFERENCES:
patent: 5198663 (1993-03-01), Ichikawa et al.
Hara Takafumi
Taruya Masaaki
Mitsubishi Denki & Kabushiki Kaisha
Moller Richard A.
Williams Hezron
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