Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1996-03-07
1998-05-05
Williams, Hezron E.
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
310329, G01P 344
Patent
active
057476918
ABSTRACT:
A frame body and a tuning fork-shaped vibratory element are made of a single crystalline silicon substrate. The vibratory element has arms extending parallel to each other. The respective sides of the frame body are located face to face with a predetermined distance from the arms. Thin portions are formed between thick portions located partially on the arms of the vibratory element. Piezo-resistant elements for detecting angular velocity are disposed on the thin portions. When electrostatic force is imposed between the sides of the frame body and the arms, the arms are excited to vibrate. At this time, when angular velocity is imposed, the arms vibrate in the direction crossing at right angles with the excited direction. The piezo-resistant elements detect vibration of the arms caused by the angular velocity with stabilized characteristics and higher sensitivity.
REFERENCES:
patent: 4598585 (1986-07-01), Boxenhorn
patent: 4628734 (1986-12-01), Watson
patent: 4694696 (1987-09-01), Hojo et al.
patent: 4699006 (1987-10-01), Boxenhorn
patent: 5016072 (1991-05-01), Greiff
patent: 5216315 (1993-06-01), Terada et al.
patent: 5216490 (1993-06-01), Greiff et al.
patent: 5349857 (1994-09-01), Kasanami et al.
patent: 5386726 (1995-02-01), Terajima
patent: 5461916 (1995-10-01), Fujii et al.
patent: 5481913 (1996-01-01), Ito et al.
patent: 5500549 (1996-03-01), Takeuchi et al.
patent: 5504356 (1996-04-01), Takeuchi et al.
Kato Kenzi
Yoshino Yoshimi
Moller Richard A.
Nippondenso Co. Ltd.
Williams Hezron E.
LandOfFree
Angular velocity sensor apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Angular velocity sensor apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Angular velocity sensor apparatus will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-56401