Angular velocity sensor and process for producing the same

Details Angular velocity sensor and process for producing the same Angular velocity sensor and process for producing the same

2011-05-24

2011-05-24

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

07946173

ABSTRACT:
An angular velocity sensor has a stable characteristic in which a vibration element has a small variation in the driving efficiency even when carbon dioxide gas is generated by the reaction with oxygen gas in a package including therein the vibration element. To realize this, the angular velocity sensor has a mixed gas of inert gas and oxygen gas in the package so that the mixed gas in the package has a pressure higher than the atmospheric pressure.

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International Search Report issued Dec. 5, 2006 in the International (PCT) Application of which the present application is the U.S. National Stage.

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