Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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G01P 344, G01P 900

Patent

active

059089865

ABSTRACT:
An angular velocity sensor comprises a silicon substrate, a vibration mass formed separate from the silicon substrate on a principal surface of the silicon substrate to vibrate in directions along first and second orthogonal axes, supporting portions for supporting the vibration mass and positioned symmetrically with respect to the first axis and the second axis and having equal spring constants in directions along the first and second axes, drive electrodes and driving means for driving the vibration mass in the direction along the first axis, and detection electrodes and detecting means for detecting displacement of the vibration mass in the direction along the second axis. The drive and/or detection electrodes of the angular velocity sensor are split into a plurality of capacitors which permit a plurality of voltage values to be applied to capacitors. Accordingly, when the vibration mass is rotated around a third axis perpendicular to the principal surface of the substrate while vibrating in the direction along the first axis, an angular velocity around the third axis can be measured by detecting a Coriolis force generated in the direction along the second axis.

REFERENCES:
patent: 5359893 (1994-11-01), Dunn
patent: 5600065 (1997-02-01), Kar et al.
patent: 5635638 (1997-06-01), Geen
patent: 5734105 (1998-03-01), Mizukoshi
Bernstein, J., et al: "A Micromachined Comb-Drive Tuning Fork Rate Gyroscope", IEEE, 1993, pp. 143-148.

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