Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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Details

C073S504140

Reexamination Certificate

active

07140249

ABSTRACT:
An angular velocity sensor having a pillar-shaped vibrator and support members. The support members clamp the vibrator from above and below, at those parts where vibration nodes are formed when the vibrator vibrates. The support members mechanically support the vibrator and are electrically connected to the vibrator. The support members have an uppermost layer covered with a silver or gold coating at the electrically connected parts. Each support member has arms and connecting parts provided at the distal ends of the arms. The connecting parts have a notch each. The support members are electrically and mechanically connected with conductive adhesive provided in the notches, applied to both surfaces of the connecting part and containing silver particles as conductive filler.

REFERENCES:
patent: 5345822 (1994-09-01), Nakamura et al.
patent: 5569969 (1996-10-01), Kasanami et al.
patent: 5668316 (1997-09-01), Iwai et al.
patent: 5765046 (1998-06-01), Watanabe et al.
patent: 6116086 (2000-09-01), Fujimoto
patent: 6694813 (2004-02-01), Koike
patent: 6907783 (2005-06-01), Fujimoto

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