Angular velocity sensor

Details Angular velocity sensor Angular velocity sensor

1995-10-25

1997-02-04

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350402, G01P 904

Patent

active

056000650

ABSTRACT:
Converting a Coriolis force into an electrical signal, an electro-mechanical transducer (10) is a field effect transistor (18) having angular velocity sensing capabilities. A gate electrode (16) is suspended over a channel region (60) of a substrate (31), is biased at a desired potential, and is oscillated along an axis (40). The gate electrode (16) and the substrate (31) are rotated about a different axis (41) at an angular velocity (44). The resulting Coriolis force displaces the suspended gate electrode (16) along yet another axis (42) which modulates a current (53) in the channel region (60) of the substrate (31). The amplitude of the current (53) describes the magnitude of the angular velocity (44).

REFERENCES:
patent: 4873871 (1989-10-01), Bai
patent: 5386726 (1995-02-01), Terajima
patent: 5392650 (1995-02-01), O'Brien et al.
patent: 5408877 (1995-04-01), Greiff et al.
patent: 5438870 (1995-08-01), Zabler et al.
patent: 5503017 (1996-04-01), Mizukoshi
patent: 5504356 (1996-04-01), Takeuchi
Leo O'Connor, Assoc. Editor-Mechanical Engineering, "Navigating with Gyroscopes and GPS", Nov. 1994, pp. 76-78.
Steven Ashley, Assoc. Editor-Mechanical Engineering, "Spin Control for Cars", Jun. 1995, pp. 66-68.

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