Angular velocity sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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Details

7350402, 7350414, G01P 904, G01P 302

Patent

active

060704632

ABSTRACT:
A downsized angular velocity sensor is disclosed in which the detection sensitivity is improved. An oscillator oscillatably supported by support beams along two horizontal axes is formed of two rod-like members extending along the Y axis and an interconnecting portion. A hollow region is formed between each of the rod-like members and the interconnecting portion. Displacement detecting sections are disposed in the hollow regions. The displacement detecting sections are each constructed of an antenna-like electrode array, so that a greater amount of change in capacitance generated between the antenna-like electrodes can be obtained.

REFERENCES:
patent: 5275047 (1994-01-01), Zabler et al.
patent: 5600065 (1997-02-01), Kar et al.
patent: 5604312 (1997-02-01), Lutz
patent: 5610334 (1997-03-01), Fima et al.
patent: 5728936 (1998-03-01), Lutz
patent: 5734105 (1998-03-01), Mizukoshi
Office Action Issued by the European Patent Office on Dec. 21, 1998 in the Corresponding EPC Application.

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