Angular velocity sensor

Details Angular velocity sensor Angular velocity sensor

1999-06-24

2000-10-24

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350416, 7350404, G01P 900

Patent

active

061349615

ABSTRACT:
An angular velocity sensor includes coupling beams supported afloat by highly flexible support beams so as to be movable relative to a substrate, with the support beams being flexible in the x-axis and a y-axis directions and being symmetrical with respect to the center of the sensor. A first vibrator and a second vibrator are supported by respective coupling beams through spring beams that are highly flexible in the x-direction, with the spring beams being symmetrical with respect to the x-axis passing through the center symmetrical to each other with respect to the y-axis passing through the center. Drive electrodes drive at least one of the first vibrator and the second vibrator to vibrate in the x-direction. First displacement detection electrodes detect a y-directional vibration of the first vibrator and second displacement detection electrodes detect a y-directional vibration of the second vibrator. Precision with respect to detecting the angular velocity is prevented from being lowered by electrical and mechanical disturbances.

REFERENCES:
patent: 5349855 (1994-09-01), Bernstein et al.
patent: 5635638 (1997-06-01), Geen
patent: 5908986 (1999-06-01), Mitamura
patent: 5992233 (1999-11-01), Clark

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