Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Patent
1998-04-27
1999-11-23
Williams, Hezron
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
73862043, G01P 344
Patent
active
059879858
ABSTRACT:
A multi-axial angular velocity sensor for detecting angular velocity components about respective coordinate axes in a three-dimensional cooridnate system has a flexible substrate having flexibility. A fixed substrate is disposed so as to oppose the flexible substrate a predetermined distance above the flexible substrate. An oscillator is fixed on a lower surface of the flexible substrate. A sensor casing supports the flexible substrate and the fixed substrate and accommodates the oscillator therewithin. A plurality of lower electrodes is provided on an upper surface of the flexible substrate and a plurality of upper electrodes are provided on a lower surface of the fixed substrate and disposed at positions respectively opposite to the lower electrodes. A piezoelectric element is disposed between the lower electrodes and the upper electrodes. An a.c. signal is applied across a pair of the lower and upper electrodes that are opposite to each other thereby to oscillate the oscillator in respective coordinate axial directions for the detecting of a potential produced across a pair of the lower and upper electrodes that are opposite to each other, thereby to detect displacements in respective coordinate axial directions of the oscillator.
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Kwok Helen C.
Williams Hezron
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