Angular velocity detection element and angular velocity measurin

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

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G01P 904

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active

061229628

ABSTRACT:
The angular velocity detection element includes: a substrate; a pair of spaced support bodies arranged on the substrate and having support-side electrodes that face each other; a movable body, disposed between the support bodies, having a pair of movable-side electrodes facing the support-side electrodes; and a vibration generator for vibrating the movable body in one direction. The support-side electrodes mounted on the support bodies and the movable-side electrodes that are mounted on the movable body are arranged such that the movable-side electrodes face the support-side electrodes. A pair of displacement detectors detect the displacement of the movable body in one direction when the vibration generator imparts a vibration in one direction to the movable body, and a pair of angular velocity detectors detect, as an angular velocity, a displacement perpendicular to the one direction in which the movable body vibrates when the angular velocity acts on the movable body.

REFERENCES:
patent: 5419194 (1995-05-01), Varnham et al.
patent: 5728936 (1998-03-01), Lutz

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