Angular rate sensor using micro electromechanical haltere

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S866400, C244S022000

Reexamination Certificate

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07107842

ABSTRACT:
An angular rate sensing system suitable for a micromechanical flying insect (MFI) device. The system includes a rod, or haltere, that is moved in a plane by a piezoelectric actuator. Bending of the haltere due to angular movement of a body onto which the haltere is coupled is sensed with a resistive strain gage. In a first embodiment the haltere is actuated (i.e., made to beat or sweep) by simple coupling to an actuator. In a second embodiment, a four-bar structure is used to amplify the motion of a piezoelectric bender to cause haltere beating. Another embodiment achieves haltere beating by parasitic transmission of vibrations of the MFI body to the base of the haltere.

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