Angular rate sensor and mounting structure of angular rate...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S504120

Reexamination Certificate

active

07318348

ABSTRACT:
An angular rate sensor includes: a substrate; a drive-purpose vibrator capable of vibrating in a first direction; and an angular velocity detection-purpose vibrator capable of vibrating in a second direction. The sensor detects an angular velocity on the basis of vibration of the angular velocity detection-purpose vibrator in the second direction caused by a Coriolis force, when the drive-purpose vibrator is vibrated in the first direction, and the angular velocity is applied to the sensor in a third direction. The angular velocity detection-purpose vibrator has a length along with the second direction and a width along with the first direction. A ratio between the width and the length is equal to or larger than 0.1.

REFERENCES:
patent: 5604312 (1997-02-01), Lutz
patent: 5728936 (1998-03-01), Lutz
patent: 6516666 (2003-02-01), Li
patent: B2-2888029 (1993-11-01), None

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