Angular rate sensor and electronic device

Details Angular rate sensor and electronic device Angular rate sensor and electronic device

2011-03-29

2011-03-29

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504120

Reexamination Certificate

active

07913560

ABSTRACT:
An angular rate sensor includes a piezoelectric vibration device; and a detection section, wherein the piezoelectric vibration device includes a vibration section having a first support section, four (first-fourth) cantilever sections supported by the first support section, and a second support section that supports the first support section. The detection section is formed above the vibration section for detecting an angular rate of rotation applied to the vibration section, and has a lower electrode, a piezoelectric layer formed above the lower electrode, and an upper electrode formed above the piezoelectric layer.

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