Angular rate sensor and acceleration sensor

Details Angular rate sensor and acceleration sensor Angular rate sensor and acceleration sensor

1997-01-17

1999-09-14

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350412, 7351429, G01P 900

Patent

active

059525720

ABSTRACT:
The sensor is a small-sized vibratory angular velocity sensor, and making use of anisotropic etching characteristics of single crystal silicon substrate, as shown in FIG. 1, four cantilever beams 103 of leading end load (masses 102) type are disposed in a cross form, and the center of gravity (coupling portion 104) thereof is supported by a bridge 105 to form a vibrator, which is excited by electrostatic force by utilizing electrodes 110, 115 formed above and below the end portion of the masses 102, and the angular rate is detected from the capacitance change.

REFERENCES:
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Satchell, D.W., et al. "A Thermally-Excited Silicon Accelerometer" May 3, 1989, Sensors and Actuators, vol. 17, Nr. 1/02, pp. 241-245 XP000118930.

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