Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate
2006-09-26
2006-09-26
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Angular rate using gyroscopic or coriolis effect
C073S504140
Reexamination Certificate
active
07111511
ABSTRACT:
An angular rate sensor includes: a quadratic prism-like oscillator1aformed by laminating a substrate2and a piezoelectric material3; a reference electrode3awhich is formed on one main surface3A of two opposed surfaces of the piezoelectric material3, the one main surface3A being bonded to the substrate2, and which is connected to a reference potential; at least one drive electrode3bwhich is formed on the other main surface3B of the two opposed surfaces of the piezoelectric material3in the longitudinal direction of the oscillator1a, and to which a signal for oscillating the oscillator1ais supplied; and at least a pair of detection electrodes3c1and3c2which are formed, in parallel with each other, on the other main surface3B of the two opposed surfaces of the piezoelectric material3in a manner to sandwich the drive electrode3b, and which output a signal corresponding to Coriolis force generated in the oscillator1a.
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Kawamura Toshiyuki
Kurihara Kazuo
Matsunaga Toru
Satoh Yoshinori
Watanabe Shigeto
Kwok Helen
Sonnenschein Nath & Rosenthal LLP
Sony Corporation
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