Angular rate sensor

Details Angular rate sensor Angular rate sensor

2006-09-26

2006-09-26

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S504140

Reexamination Certificate

active

07111511

ABSTRACT:
An angular rate sensor includes: a quadratic prism-like oscillator1aformed by laminating a substrate2and a piezoelectric material3; a reference electrode3awhich is formed on one main surface3A of two opposed surfaces of the piezoelectric material3, the one main surface3A being bonded to the substrate2, and which is connected to a reference potential; at least one drive electrode3bwhich is formed on the other main surface3B of the two opposed surfaces of the piezoelectric material3in the longitudinal direction of the oscillator1a, and to which a signal for oscillating the oscillator1ais supplied; and at least a pair of detection electrodes3c1and3c2which are formed, in parallel with each other, on the other main surface3B of the two opposed surfaces of the piezoelectric material3in a manner to sandwich the drive electrode3b, and which output a signal corresponding to Coriolis force generated in the oscillator1a.

REFERENCES:
patent: 5765046 (1998-06-01), Watanabe et al.
patent: 6477897 (2002-11-01), Mori
patent: 2005/0115318 (2005-06-01), Kawamura et al.
patent: 2005/0146618 (2005-07-01), Matsunaga et al.
patent: 2005/0188766 (2005-09-01), Matsunaga et al.
patent: 9-304081 (1997-11-01), None
patent: 10-47968 (1998-02-01), None
patent: 11-83495 (1999-03-01), None

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