Angular rate sensor

Details Angular rate sensor Angular rate sensor

1993-06-03

1996-07-23

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

G01P 344

Patent

active

055378722

ABSTRACT:
An angular rate sensor comprises a wafer of silicon etched to form tines with teeth which are interdigitated. The tines are excited into oscillation in the plane of the wafer, by applying suitable drive signals to create electrostatic forces between the tines. Rotation of the tines out of the plane of the wafer is detected by a suitable detector, such as a piezo-resistor on a support of the tines.

REFERENCES:
patent: 4381672 (1983-05-01), O'Connor et al.
patent: 4538461 (1985-09-01), Juptner
patent: 4654663 (1987-03-01), Alsenz et al.
patent: 4744248 (1988-05-01), Stewart
patent: 4898032 (1990-02-01), Voles
patent: 5025346 (1991-06-01), Tang et al.
patent: 5285686 (1994-02-01), Peters

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