Angular rate sensor

Details Angular rate sensor Angular rate sensor

1998-06-22

2000-04-04

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

7350402, 7350412, G01P 904

Patent

active

060447079

ABSTRACT:
A first floating body is supported by a silicon substrate so as to be movable in the x-direction and substantially unmovable in the y-direction. A second floating body is supported by the first floating body so as to be substantially unmovable in the x-direction and movable in the y-direction. A driving circuit and a pair of fixed electrodes having comb finger electrodes vibration-drive the first movable body in the x-direction. Fixed comb finger electrodes and a capacitance detection circuit detect a y-directional displacement of the second movable body and generate a displacement signal. A signal processing circuit converts the displacement signal into an angular rate signal.

REFERENCES:
patent: 5604312 (1997-02-01), Lutz

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