Angular limitation device in a charged particle beam system

Details Angular limitation device in a charged particle beam system Angular limitation device in a charged particle beam system

1982-08-31

1985-01-08

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

With target means

250396R, H01J 3700, A61K 2702

Patent

active

044928700

ABSTRACT:
The device according to the invention comprises a source and an electronic optical system permitting the projection of the beam onto a target plane. According to the invention, a diaphragm for the angular limitation of the beam is positioned between the source and the electronic optical system, the useful current of the beam at the target plane being more than one thousandth of the current emitted by the source.

REFERENCES:
patent: 4182958 (1980-01-01), Goto et al.
patent: 4199689 (1980-04-01), Takigawa
patent: 4218621 (1980-08-01), Nakasuji et al.
patent: 4243866 (1981-01-01), Pfeiffer et al.
patent: 4282437 (1981-08-01), Boie
Electronics International, vol. 50, No. 10, May 1977, by: Chang et al, "Electron-Beam Lithography Draws a Finer Line" pp. 89-98.

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