Angled implant to improve high current operation of transistors

Active solid-state devices (e.g. – transistors – solid-state diode – Bipolar transistor structure – With base region having specified doping concentration...

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257593, H01L 21331

Patent

active

059820225

ABSTRACT:
Method and apparatus for improving the high current operation of bipolar transistors while minimizing adverse affects on high frequency response are disclosed. A local implant to increase the doping of the collector at the collector to base interface is achieved by the use of an angled ion implant of collector impurities through the emitter opening. The resulting area of increased collector doping is larger than the emitter opening, which minimizes carrier injection from the emitter to the collector, but is smaller than the area of the base.

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patent: 5336926 (1994-08-01), Mattews
patent: 5344787 (1994-09-01), Nagalingam et al.
patent: 5698459 (1997-12-01), Grubisich et al.

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