Ancillary equipment for testing semiconductor integrated...

Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor

Reexamination Certificate

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Reexamination Certificate

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07148676

ABSTRACT:
An ancillary equipment is provided for testing a semiconductor integrated circuit, by which a plurality of BOST boards serving as measuring units can be set near a device to be measured and tests can be conducted with high accuracy on a number of circuits embedded on a semiconductor integrated circuit such as a system LSI. To achieve an object of performing a go
o go test or a functional/performance characterization in the manufacturing process of the semiconductor integrated circuit, the ancillary equipment includes: a device measuring unit having a measuring section for exchanging a signal with a device or a semiconductor integrated circuit, and an analyzing section for analyzing information from the measuring section using a programmable device; and a control/communication card constituted of a board different from that of the device measuring unit and connected to the device measuring unit to control it, and being capable of performing communication with a general-purpose computer.

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patent: 2002/0118017 (2002-08-01), Mori et al.

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