Anchor for device package

Details Anchor for device package Anchor for device package

2006-01-31

2006-01-31

Williams, Alexander Oscar (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

With desiccant, getter, or gas filling

C257S414000, C257S415000, C257S416000, C257S419000, C257S732000, C257S774000, C257S680000, C331S167000, C359S290000, C359S291000, C359S224200, C359S298000, C156S345430, C438S050000, C438S022000, C438S052000, C361S762000, C361S761000, C174S256000, C174S050510

Reexamination Certificate

active

06992375

ABSTRACT:
An anchor to hold getter materials in place within a micromechanical device package substrate. First and second cavity faces define an anchor cavity and mechanically retain a getter away from a region holding the micromechanical device. The getter anchor may be formed in a substrate comprised of at least three layers. The layers form a cavity in the substrate with a wide bottom portion—formed in the middle layer and a relatively narrower top portion—formed by the top layer. The narrow portion helps to retain the getter in the cavity by creating a mechanical lock on the wide portion of getter in the bottom of the cavity.

REFERENCES:
patent: 3178506 (1965-04-01), Dereich et al.
patent: 5061049 (1991-10-01), Hornbeck
patent: 5583688 (1996-12-01), Hornbeck
patent: 6489178 (2002-12-01), Coyle et al.
patent: 6740946 (2004-05-01), Funaki
patent: 6800210 (2004-10-01), Patel et al.
patent: 6872902 (2005-03-01), Cohn et al.

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