Analyzing method for foreign matter states

Details Analyzing method for foreign matter states Analyzing method for foreign matter states

1994-03-31

1995-10-10

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378 46, 378 45, 378 53, G01N 23223

Patent

active

054577250

ABSTRACT:
A method for identifying foreign matter in or on a sample, using apparatus composed of an X-ray generator, an X-ray detector, and a sample stage having a tilting mechanism capable of fixing a sample and changing both its irradiation and detection angles at the same time, an inclination fixing jig, and a calculation processing unit for executing bulk composition calculation at each angle according to the obtained X-ray intensity which is detected at the each angle. A judgment is made such that there is foreign matter mixed in the sample material when the bulk composition indications are coincident even when the angle is changed, while there is foreign matter at the surface of the sample when the bulk composition indications are not coincident.

REFERENCES:
patent: 5081658 (1992-01-01), Imai et al.

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