Analyzing error signals based on fault detection

Details Analyzing error signals based on fault detection Analyzing error signals based on fault detection

2005-02-01

2005-02-01

Picard, Leo (Department: 2125)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C714S002000, C438S012000

Reexamination Certificate

active

06850811

ABSTRACT:
A method and system are provided for analyzing error signals based on fault detection. The method comprises detecting a fault associated with a processing of a workpiece in a manufacturing system having a plurality of processing tools, identifying at least one of the processing tools that processes the workpiece, and providing an error signal to the at least one of the identified processing tools to perform diagnostics based on the detected fault.

REFERENCES:
patent: 5341304 (1994-08-01), Sakamoto et al.
patent: 5940300 (1999-08-01), Ozaki
patent: 5991699 (1999-11-01), Kulkarni et al.
patent: 6246787 (2001-06-01), Hennessey et al.
patent: 6701204 (2004-03-01), Nicholson
patent: 6763130 (2004-07-01), Somekh et al.
patent: 20030083754 (2003-05-01), Tripathi et al.

Affiliated with

Also associated with

Rating

Analyzing error signals based on fault detection does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Analyzing error signals based on fault detection, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Analyzing error signals based on fault detection will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3474880