Analyzer for total reflection fluorescent x-ray and its correcti

Details Analyzer for total reflection fluorescent x-ray and its correcti Analyzer for total reflection fluorescent x-ray and its correcti

1994-10-06

1995-10-10

Porta, David P.

X-ray or gamma ray systems or devices

Specific application

Fluorescence

378 46, 378 48, 378 90, G01N 23223

Patent

active

054577268

ABSTRACT:
A sample is mounted on a sample base. A detector is provided on the sample base, and detects a fluorescent X-ray generated from the sample, and a scattered X-ray of an incident X-ray when the sample is irradiated with the incident X-ray. A controller controls the sample base and an operation of the detector. The controller sequentially changes an incident angle of the incident X-ray to the sample so as to detect the fluorescent X-ray generated from the sample at each incident angle, and the scattered X-ray of the incident X-ray. Next, the controller obtains the relationship between the incident angle of the incident X-ray to the sample and a standard value obtained by standardizing intensity of the fluorescent X-ray by intensity of the scattered X-ray. Then, the controller corrects the incident angle of the incident X-ray to the sample based on the obtained relationship. Moreover, the controller corrects the positional relationship between an irradiation position of the incident X-ray to the sample and said detector based on the obtained relationship. In this case, the correction of the incident angle of the incident X-ray to said sample is made after ending the correction of the positional relationship.

REFERENCES:
patent: 3375369 (1968-03-01), Goldman et al.
patent: 3621245 (1971-11-01), Clayton et al.
patent: 4169228 (1979-09-01), Briska et al.
patent: 5077766 (1991-12-01), Schwenke et al.
patent: 5128545 (1992-07-01), Komi
patent: 5220591 (1993-06-01), Obsugi et al.
patent: 5249216 (1993-09-01), Obsugi et al.

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