Analyzer detector window and a method for manufacturing the same

Details Analyzer detector window and a method for manufacturing the same Analyzer detector window and a method for manufacturing the same

1989-11-21

1992-02-18

Howell, Janice A.

X-ray or gamma ray systems or devices

Beam control

Window

2503851, H01J 518

Patent

active

050900463

ABSTRACT:
The invention relates to a detector window for an analyzer, particularly an X-ray analyzer, and to a method for manufacturing the same. The detector window is permeable to soft X-rays when the window is at least on one surface in contact with a pressure essentially equal to that of a vacuum. The detector window of the invention is a thin film, with the thickness of 0.5 .mu.m, and is manufactured by means of photolitography.

REFERENCES:
patent: 3296478 (1967-01-01), Ichinokawa
patent: 4122967 (1978-10-01), Rohrich
patent: 4862490 (1989-08-01), Karnezos et al.
patent: 4933557 (1990-06-01), Perkins et al.
patent: 4960486 (1990-10-01), Perkins et al.
Rimbert, J. N., Testard, O. A., "X-, B-ray Detector Windows of Compo . . . ", Apr. 21, '86, pp. 95-100.

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