Analyzer

Details Analyzer Analyzer

2007-10-23

2007-10-23

Connolly, Patrick (Department: 2877)

Optics: measuring and testing

By light interference

Having partially reflecting plates in series

Reexamination Certificate

active

10953876

ABSTRACT:
An analyzer includes an optical tunable filter1for selectively outputting light having a predetermined wavelength, and a PD421for receiving light outputted from the optical tunable filter1and then passed through or reflected by an object to be measured. The optical tunable filter1includes a first substrate3including a movable portion31having a light transmitting property; a second substrate2having a light transmitting property, the second substrate being provided so as to be opposed to the first substrate; a first gap21and a second gap22which are respectively provided between the movable portion31of the first substrate3and the second substrate2; an interference portion which cases interference with light that enters the optical tunable filter1and that has the predetermined wavelength between the movable portion and the second substrate2by means of the second gap22; and a driving portion for changing a distance of the second gap22by displacing the movable portion31with respect to the second substrate2using the first gap21.

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Communication from Japanese Patent Office re: related application.

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