Optics: measuring and testing – Shape or surface configuration
Reexamination Certificate
2005-01-11
2005-01-11
Toatley, Jr., Gregory J. (Department: 2877)
Optics: measuring and testing
Shape or surface configuration
C356S394000, C250S23700G
Reexamination Certificate
active
06842259
ABSTRACT:
A method is disclosed for evaluating isolated and aperiodic structure on a semiconductor sample. A probe beam from a coherent laser source is focused onto the structure in a manner to create a spread of angles incidence. The reflected light is monitored with an array detector. The intensity or polarization state of the reflected beam as a function of radial position within the beam is measured. Each measurement includes both specularly reflected light as well as light that has been scattered from the aperiodic structure into that detection position. The resulting output is evaluated using an aperiodic analysis to determine the geometry of the structure.
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Opsal Jon
Rosencwaig Allan
Nguyen Sang H.
Stallman & Pollock LLP
Therma-Wave, Inc.
Toatley , Jr. Gregory J.
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