Analysis of integrated circuit operability using a focused ion b

Details Analysis of integrated circuit operability using a focused ion b Analysis of integrated circuit operability using a focused ion b

1992-12-04

1994-12-27

Karlsen, Ernest F.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324501, G01R 3128

Patent

active

053768833

ABSTRACT:
A method and apparatus for analyzing the operability of a semiconductor integrated circuit without removing a passivation film formed on a surface of the circuit and also for analyzing causes of failure of such circuit. The integrated circuit wiring receives an AC test signal and a predetermined portion of the surface of the circuit is simultaneously scanned and irradiated with a focused ion beam while the portion is irradiated with an electron beam to neutralize charges produced by the ion beam irradiation. Then, secondary electrons which are released from the surface of the circuit as a result of the focused ion beam irradiation are detected, and the detected signals are matched with a scanning signal to display an image of the semiconductor integrated circuit.

REFERENCES:
patent: 4578279 (1986-03-01), Zingher
patent: 4629898 (1986-12-01), Orloff et al.
patent: 4686466 (1987-08-01), Feuerbaum et al.
patent: 5053699 (1991-10-01), Aton

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