X-ray or gamma ray systems or devices – Specific application – Fluorescence
Reexamination Certificate
2007-11-27
2007-11-27
Thomas, Courtney (Department: 2882)
X-ray or gamma ray systems or devices
Specific application
Fluorescence
Reexamination Certificate
active
11538652
ABSTRACT:
A method and computer program software product for establishing an areal density of an elemental constituent of one layer of a stack of layers of material overlying a substrate. Incident penetrating radiation excites characteristic x-ray fluorescent radiation in multiple lines associated with each of one or more elements. Areal densities of successive layers are determined by self-consistent solution of equations relating the ratios of intensities of the characteristic fluorescence lines of successive elements.
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Bromberg & Sunstein LLP
ThermoNITON Analyzers LLC
Thomas Courtney
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