Analysis method and analysis apparatus

Details Analysis method and analysis apparatus Analysis method and analysis apparatus

2011-04-12

2011-04-12

Nguyen, Kiet T (Department: 2881)

Radiant energy

Ionic separation or analysis

C250S282000

Reexamination Certificate

active

07923680

ABSTRACT:
An analysis apparatus includes a first process part for removing a film formed on a substrate by irradiating the film with ultraviolet light, a second process part for providing a solution onto a surface of the substrate for dissolving an object being analyzed on the substrate, and a third process part for analyzing the object being analyzed in the solution that is used in the second step.

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