Analysis apparatus and analysis method

Details Analysis apparatus and analysis method Analysis apparatus and analysis method

2005-05-31

2005-05-31

Barlow, John (Department: 2863)

Data processing: measuring, calibrating, or testing

Measurement system

Performance or efficiency evaluation

C073S023200, C703S007000, C703S007000

Reexamination Certificate

active

06901349

ABSTRACT:
An analysis apparatus has a measurement head for measuring characteristics of a sample, a calibration conditions file comprising at least one calibration condition obtained by carrying out device calibration for the measurement head in advance, and a measurement head controller for designating one of the calibration conditions within the calibration conditions file. Measurement sequence data comprised of a sequence of measurement steps has measurement conditions for carrying out measurements by the measurement head and the calibration conditions designated by the measurement head controller. A measurement device refers to each measurement step of the measurement sequence data and carries out measurement after inputting the measurement conditions and the calibration conditions for each measurement step to the measurement head.

REFERENCES:
patent: 5025653 (1991-06-01), Schuldt
patent: 6622104 (2003-09-01), Wang et al.
patent: 6782332 (2004-08-01), Seip et al.

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