Analog MEMS with non-linear support

Details Analog MEMS with non-linear support Analog MEMS with non-linear support

2008-04-15

2008-04-15

Spector, David N. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S290000, C359S224200, C359S872000

Reexamination Certificate

active

07359107

ABSTRACT:
The disclosed embodiments reveal an analog MEMS device with a pivotal micromirror that is supported by one or more beams that provide non-linear resistance. An electrode can electrostatically attract the micromirror, while the beam(s) provide resistance to deflection. When the forces equalize, the micromirror is held at a target angle. The beam support disclosed in the embodiments is superior to conventional torsion hinge supports, because it provides non-linear support for the micromirror, better matching the non-linear nature of the electrostatic force.

REFERENCES:
patent: 5661591 (1997-08-01), Lin et al.
patent: 5739941 (1998-04-01), Knipe et al.
patent: 6775050 (2004-08-01), Yoon et al.
patent: 2006/0082251 (2006-04-01), He et al.
Victor M. Bright and David M. Burns, “Nonlinear flexures for stable deflection of an electrostatically actuated micromirror,” Air Force Institute of Technology, Department of Electrical and Computer Engineering, SPIE vol. 3226, 1997.

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