Amplified pressure transducer

Details Amplified pressure transducer Amplified pressure transducer

1991-09-19

1993-02-23

Woodiel, Donald O.

Measuring and testing

Fluid pressure gauge

With pressure and/or temperature compensation

73721, 73727, 73862623, 338 3, 338 4, G01L 708, G01L 906, G01L 1904

Patent

active

051879859

ABSTRACT:
A pressure transducer circuit is provided which includes a bridge arrangement of piezoresistors which are connected to a diaphragm that is sensitive to a pressure which is monitored. The output of the sensor bridge is provided to a preamplifier which is, in turn, associated with an attenuation network and compensation circuitry. The transducer incorporates a plurality of temperature sensitive resistors within the compensation circuit and these temperature sensitive resistors are produced at the same time and during the same manufacturing step as the piezoresistors of the bridge arrangement. In addition, they are produced using the same dopant and are implanted or diffused in the same semiconductor layer as the piezoresistors. The pressure transducer circuit incorporates a plurality of trimmable resistors which are adjusted during a calibration stage to compensate for temperature variations and nonlinearity of the numerous components in the circuit. The present invention eliminates the necessity for the use of thermistors to provide this compensation.

REFERENCES:
patent: 4345477 (1982-08-01), Johnson
patent: 4656454 (1987-04-01), Rosenberger
patent: 5146788 (1992-09-01), Raynes

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