Amplified flow through pressure sensor

Details Amplified flow through pressure sensor Amplified flow through pressure sensor

2006-12-04

2008-10-07

Allen, Andre J (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S727000

Reexamination Certificate

active

07430918

ABSTRACT:
A MEMS based pressure sensor for flow measurements includes a pressure sense die located between a media seal and a conductive seal. Such a system includes a pressure sense die located between a media seal and a conductive seal. A sensing diaphragm is generally associated with the pressure sense die, wherein the sensing diaphragm deflects when a pressure is applied thereto. An impedance circuit is generally embedded with one or more resistors on the sensing diaphragm to which the pressure to be detected is applied. An ASIC is generally associated with the impedance circuit and the sense die, wherein the ASIC is placed on a lead frame for signal conditioning in order to detect a change in the pressure.

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